CPC-80
| SPECIFICATION | |||||||||
| DC Series: | |||||||||
| DESCRIPTION | |
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Main characteristics: ❖ 7 inch color touch screen interactive operation interface
- Graphical displays operation interface and automatically monitor processing parameters and
working status.
- 0~99 protocols available
- Can store, output, trace processing data.
- Operation / Stop prompt.
❖ PLC industrial computer controls the whole cleaning process. Two modes available at user’s option:
manual and auto.
❖ The vacuum system and valves are made of high quality 316 stainless steel, with good corrosion
resistance and no pollution.
❖ Automatic matching, RF power is adjustable.
❖ Dwyer gas float flowmeters. Unique dual gas control ensures very stable gas flow. Dual gas paths are
included as standard to ensure more uniform gas distribution. Compatible gases: oxygen, argon, nitrogen,
carbon tetrafluoride, hydrogen or gas mixture.10
❖ HEPA efficient filtration and gas backfill purge prevent secondary pollution.
❖ Patented arc-shaped plate electrode ensures stronger plasma excitation and better cleaning effect.
❖ Split design, easy to use in glove box.
❖ Safety protection mechanism automatically switches off electrical power when the chamber door is open.
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